IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 26 - 38
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 20 - 25
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 13 - 19
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 39 - 50
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 1 - 4
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 1 > 5 - 12
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 2 > 68 - 76
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 2 > 187 - 188